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Study of Pt/C x-ray multilayer structure as a function of layer perid using x-ray scattering

DSpace at IIT Bombay

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Title Study of Pt/C x-ray multilayer structure as a function of layer perid using x-ray scattering
 
Creator LODHA, G
PAUL, A
VITTA, S
GUPTA, A
NANDEDKAR, R
YAMASHITA, K
KUNIEDA, H
TAWARA, Y
TAMURA, K
HAGA, K
OKAJIMA, T
 
Subject interfacial roughness
w/si multilayers
reflection
x-ray multilayers
x-ray reflectivity
diffused scattering
interfacial roughness
 
Description Pt/C x-ray multilayer, with varying period lengths d, ranging from 4.7 nm to 3.5 nm were made by de magnetron sputtering under identical deposition conditions. The Pt layer thickness in ail the cases was maintained at a nominal value of 0.37d and a total of 20 layer periods were deposited in each case. Since the morphology in the interface plane and along the growth direction is important for imaging applications, the dependence of this on the layer period has been investigated using x-ray scattering. The grazing incidence x-ray scattering technique has been used to study both the specular and diffuse scattering behaviour of these multilayer structures. The interface roughness was determined from the specular reflectivity measured over a targe momentum transfer range using both 0.154 nm and 0.834 nm wavelength x-rays. The interface roughness was found to vary from similar to 0.32 nm to 0.40 nm with decreasing period. The diffuse component of scattering on the other hand was found to decrease with a decrease in layer period. The atomic ordering in the individual layers studied using high angle x-ray diffraction shows clearly the presence of crystallinity in the Pt layers, independent of the layer period.
 
Publisher JAPAN J APPLIED PHYSICS
 
Date 2011-10-22T07:40:27Z
2011-12-15T09:10:48Z
2011-10-22T07:40:27Z
2011-12-15T09:10:48Z
1999
 
Type Article; Proceedings Paper
 
Identifier JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,38,289-292
0021-4922
http://dspace.library.iitb.ac.in/xmlui/handle/10054/14842
http://hdl.handle.net/100/1669
 
Source 2nd International Conference on Synchrotron Radiation in Materials Science (SRMS-2),KOBE, JAPAN,OCT 31-NOV 03, 1998
 
Language English