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Effect of torsion arm dimensions on natural frequency of a torsion mirror

DSpace at IIT Bombay

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Title Effect of torsion arm dimensions on natural frequency of a torsion mirror
 
Creator CHANDORKAR, SA
APTE, PR
 
Description Micron-size torsion-mirrors, made in silicon, have been proposed and used in several optical communication applications. A very common structure used for torsion mirror, a framed diaphragm pivoted on two torsion wires, is analyzed for their frequency response as a function parameters of torsion wires, the silicon diaphragm and frame. The aim of the simulations is to obtain as high a natural frequency of vibration while maintaining a stiff frame around the diaphragm mirror. A set of optimum values of parameters could be determined for a given frequency of vibration.
 
Publisher SPIE-INT SOC OPTICAL ENGINEERING
 
Date 2011-10-23T21:57:00Z
2011-12-15T09:11:10Z
2011-10-23T21:57:00Z
2011-12-15T09:11:10Z
2002
 
Type Proceedings Paper
 
Identifier PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2,4746,530-533
0-8194-4500-2
0277-786X
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15248
http://hdl.handle.net/100/1899
 
Source 11th International Workshop on the Physics of Semiconductor Devices,New Delhi, INDIA,DEC 11-15, 2001
 
Language English