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Improvement in reliability of MEMS resonator using multi-layers

DSpace at IIT Bombay

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Title Improvement in reliability of MEMS resonator using multi-layers
 
Creator APTE, PR
PATANKAR, PU
BIRARI, NS
 
Subject reliability
mems
fatigue
multi-layers
temperature variation
ansys
thermal stress
 
Description Many promising applications of MEMS based devices are in critical systems. Hence, their reliability has become an important issue. The techniques used for the fabrication of these devices give rise to large residual stresses. This coupled with their high speeds of operation make them prone to fatigue failure. The focus of this work is the improvement of reliability under fatigue loading using multi-layers. This paper demonstrates that by adjusting the thickness ratios, the stress in a multi-layered resonator can be prevented from alternating. Moreover, the peak stress can be minimized and performance can be improved in harsh environments.
 
Publisher SPIE-INT SOC OPTICAL ENGINEERING
 
Date 2011-10-24T00:35:54Z
2011-12-15T09:11:20Z
2011-10-24T00:35:54Z
2011-12-15T09:11:20Z
2004
 
Type Proceedings Paper
 
Identifier RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS III,5343,31-36
0-8194-5251-3
0277-786X
http://dx.doi.org/10.1117/12.524442
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15282
http://hdl.handle.net/100/2003
 
Source 3rd Conference on Reliability, Testing, and Characterization of MEM/MOEMS,San Jose, CA,JAN 26-28, 2004
 
Language English