Improvement in reliability of MEMS resonator using multi-layers
DSpace at IIT Bombay
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Title |
Improvement in reliability of MEMS resonator using multi-layers
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Creator |
APTE, PR
PATANKAR, PU BIRARI, NS |
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Subject |
reliability
mems fatigue multi-layers temperature variation ansys thermal stress |
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Description |
Many promising applications of MEMS based devices are in critical systems. Hence, their reliability has become an important issue. The techniques used for the fabrication of these devices give rise to large residual stresses. This coupled with their high speeds of operation make them prone to fatigue failure. The focus of this work is the improvement of reliability under fatigue loading using multi-layers. This paper demonstrates that by adjusting the thickness ratios, the stress in a multi-layered resonator can be prevented from alternating. Moreover, the peak stress can be minimized and performance can be improved in harsh environments.
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Publisher |
SPIE-INT SOC OPTICAL ENGINEERING
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Date |
2011-10-24T00:35:54Z
2011-12-15T09:11:20Z 2011-10-24T00:35:54Z 2011-12-15T09:11:20Z 2004 |
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Type |
Proceedings Paper
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Identifier |
RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS III,5343,31-36
0-8194-5251-3 0277-786X http://dx.doi.org/10.1117/12.524442 http://dspace.library.iitb.ac.in/xmlui/handle/10054/15282 http://hdl.handle.net/100/2003 |
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Source |
3rd Conference on Reliability, Testing, and Characterization of MEM/MOEMS,San Jose, CA,JAN 26-28, 2004
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Language |
English
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