Record Details

Novel high-Q torsion microresonator

DSpace at IIT Bombay

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Title Novel high-Q torsion microresonator
 
Creator APTE, P
GAWARIKAR, A
AJISHNA, G
SAHOO, SK
 
Subject decoupled resonator
mems
torsion resonator
doubly-supported
high q-factor
 
Description In this paper, we propose a resonator structure with a high Q factor, which has the potential to replace the Quartz crystal. In order to achieve a higher Q, complete decoupling of the resonating structure from the supporting ends is desired. One of the ways of achieving this is to distribute the stress uniformly throughout the support beam rather than their being concentrated at the fixed ends. This suggests a resonating mass supported by torsion wires. Here, three resonating structures are connected in a serial fashion. The outer two resonators act as interfaces to the external oscillator circuit, while the centre one is fully decoupled. The losses at the end of torsion wires are thus kept to lowest value. The other losses, namely damping and internal friction losses, are kept to a minimum by providing vacuum and using high quality material for the torsion wire. Modal analysis and static stress analysis were done on the structures and results clearly show the fundamental torsion mode of vibration and extremely small stresses at the fixed ends of the torsion wire.
 
Publisher SPIE-INT SOC OPTICAL ENGINEERING
 
Date 2011-10-24T01:22:09Z
2011-12-15T09:11:21Z
2011-10-24T01:22:09Z
2011-12-15T09:11:21Z
2005
 
Type Proceedings Paper
 
Identifier MEMS/MOEMS Components and Their Applications II,5717,211-218
0-8194-5691-8
0277-786X
http://dx.doi.org/10.1117/12.590016
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15293
http://hdl.handle.net/100/2015
 
Source Conference on MEMS/MOEMS Components and Their Applications II,San Jose, CA,JAN 24-25, 2005
 
Language English