Record Details

Optical analysis of scanning microstereolithography systems - art. no. 61090C

DSpace at IIT Bombay

View Archive Info
 
 
Field Value
 
Title Optical analysis of scanning microstereolithography systems - art. no. 61090C
 
Creator DESHMUKH, SP
DUBEY, S
GANDHI, PS
 
Subject microstereolithography
micro-fabrication
mems
 
Description Microstereolithography (MSL) is rapidly developing technique for micro-fabrication. Vector-by-vector scanning MSL has a potential to create true 3D micro-devices as compared to mostly planar (2D-21/2D) devices fabricated by conventional MEMS techniques. Previous literature shows two different scanning methods :(1) Galvanomirror scanning, (2) Photoreactor tank scanning. Galvanomirror scanning technique has higher fabrication speed but poor resolution because of defocusing of laser spot on the resin surface. Photo-reactor tank scanning has higher resolution but produces a wavy structures and limited speed of fabrication. This paper proposes and develops an offaxis lens scanning technique for MSL and carries out optical analysis to compare its performance with the existing techniques mentioned above. The comparison clearly demonstrates improved performance with the proposed offaxis lens scanning technique.
 
Publisher SPIE-INT SOC OPTICAL ENGINEERING
 
Date 2011-10-24T02:37:35Z
2011-12-15T09:11:23Z
2011-10-24T02:37:35Z
2011-12-15T09:11:23Z
2006
 
Type Proceedings Paper
 
Identifier Micromachining and Microfabrication Process Technology XI,6109,C1090-C1090
0-8194-6151-2
0277-786X
http://dx.doi.org/10.1117/12.645856
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15309
http://hdl.handle.net/100/2034
 
Source Conference on Micromachining and Microfabrication Process Technology XI,San Jose, CA,JAN 25, 2006
 
Language English