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Investigation of reverse micro-EDM process for generating high aspect ratio micro-electrode arrays

DSpace at IIT Bombay

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Title Investigation of reverse micro-EDM process for generating high aspect ratio micro-electrode arrays
 
Creator MASTUD, SA
SINGH, RK
JOSHI, SS
 
Subject arrayed micro-electrodes
micro-edm
reverse micro-edm
 
Description Deep arrayed micro-hole arrays find applications in air-bearings, inkjet nozzles, micro filters, and single cell manipulation devices. Typically, high aspect ratio micro-electrodes are required for creation of deep blind/through holes. Reverse micro-EDM has the potential for generating high aspect ratio arrayed micro-electrodes. It involves reverse replication of arrayed micro-holes in a plate on to a larger diameter bulk electrode thereby creating high aspect ratio micro-rod arrays. While the process is well-known for its application in the macro-domain, there have been extremely limited studies in its application in the micro-domain. In this work, micro-electrode arrays having different cross-sections and dimensions have been fabricated. A micro-electrode 60 mu m in diameter and an aspect ratio of 33 has been successfully fabricated. Machined micro-electrodes are assessed for geometrical accuracy, surface finish, and surface morphology. The chemical composition of machined rods has been investigated via Energy Dispersive Spectroscopy (EDS).
 
Publisher PROFESSIONAL ENGINEERING PUBLISHING LTD
 
Date 2011-10-25T06:32:01Z
2011-12-15T09:11:33Z
2011-10-25T06:32:01Z
2011-12-15T09:11:33Z
2009
 
Type Proceedings Paper
 
Identifier 4M/ICOMM 2009 - THE GLOBAL CONFERENCE ON MICRO MANUFACTURE,153-156
http://dx.doi.org/10.1243/17547164C0012009026
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15632
http://hdl.handle.net/100/2142
 
Source International Conference on Mult-Material Micro Manufacture/ International Conference on Micro Manufacting,Karlsruhe, GERMANY,SEP , 2009
 
Language English