Investigation of reverse micro-EDM process for generating high aspect ratio micro-electrode arrays
DSpace at IIT Bombay
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Title |
Investigation of reverse micro-EDM process for generating high aspect ratio micro-electrode arrays
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Creator |
MASTUD, SA
SINGH, RK JOSHI, SS |
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Subject |
arrayed micro-electrodes
micro-edm reverse micro-edm |
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Description |
Deep arrayed micro-hole arrays find applications in air-bearings, inkjet nozzles, micro filters, and single cell manipulation devices. Typically, high aspect ratio micro-electrodes are required for creation of deep blind/through holes. Reverse micro-EDM has the potential for generating high aspect ratio arrayed micro-electrodes. It involves reverse replication of arrayed micro-holes in a plate on to a larger diameter bulk electrode thereby creating high aspect ratio micro-rod arrays. While the process is well-known for its application in the macro-domain, there have been extremely limited studies in its application in the micro-domain. In this work, micro-electrode arrays having different cross-sections and dimensions have been fabricated. A micro-electrode 60 mu m in diameter and an aspect ratio of 33 has been successfully fabricated. Machined micro-electrodes are assessed for geometrical accuracy, surface finish, and surface morphology. The chemical composition of machined rods has been investigated via Energy Dispersive Spectroscopy (EDS).
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Publisher |
PROFESSIONAL ENGINEERING PUBLISHING LTD
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Date |
2011-10-25T06:32:01Z
2011-12-15T09:11:33Z 2011-10-25T06:32:01Z 2011-12-15T09:11:33Z 2009 |
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Type |
Proceedings Paper
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Identifier |
4M/ICOMM 2009 - THE GLOBAL CONFERENCE ON MICRO MANUFACTURE,153-156
http://dx.doi.org/10.1243/17547164C0012009026 http://dspace.library.iitb.ac.in/xmlui/handle/10054/15632 http://hdl.handle.net/100/2142 |
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Source |
International Conference on Mult-Material Micro Manufacture/ International Conference on Micro Manufacting,Karlsruhe, GERMANY,SEP , 2009
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Language |
English
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