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Extensive reliability analysis of Tungsten dot NC devices embedded in HfAlO high-k dielectric under NAND (FN/FN) operation

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Title Extensive reliability analysis of Tungsten dot NC devices embedded in HfAlO high-k dielectric under NAND (FN/FN) operation
 
Creator SINGH, PK
NAINANI, A
 
Subject metal nanocrystal memories
fabrication
 
Description In this work we present an extensive reliability and performance evaluation of Tungsten dot Nanocrystal (NC) devices under NAND mode of operation. Improvement in performance and reliability was observed with scaling W and L. The use of better high-k processing is proposed to improve the reliability. We also propose a numerical simulation model for NC memory devices using transient capacitive charging model. The approach is very generic and computationally less extensive than the previous works.
 
Publisher IEEE
 
Date 2011-10-26T03:47:26Z
2011-12-15T09:11:47Z
2011-10-26T03:47:26Z
2011-12-15T09:11:47Z
2007
 
Type Proceedings Paper
 
Identifier IPFA 2007: PROCEEDINGS OF THE 14TH INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS,197-201
978-1-4244-1014-9
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15900
http://hdl.handle.net/100/2292
 
Source 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits,Bangalore, INDIA,JUL 11-13, 2007
 
Language English