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On the failure mechanism and current instabilities in RESURF type DeNMOS device under ESD conditions

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Title On the failure mechanism and current instabilities in RESURF type DeNMOS device under ESD conditions
 
Creator SHRIVASTAVA, M
SCHNEIDER, J
BAGHINI, MS
GOSSNER, H
RAO, VR
 
Subject cmos technologies
nmos
behavior
demos
esd failure
space charge buildup
filamentation
pulse-to-pulse instability
 
Description We present 3D device modeling of RESURF or non-STI type DeNMOS device under ESD conditions. The impact of base push-out, pulse-to-pulse instability and electrical imbalance on the various phases of filamentation is discussed. A new phenomenon called "week NPN action" and the cause of early and fast failure is identified. A modification of the device is proposed which achieved an improvement of similar to 5X in failure threshold (I(T2)) and similar to 2X in ESD window without degrading its I/O performance.
 
Publisher IEEE
 
Date 2011-10-24T22:59:28Z
2011-12-15T09:11:49Z
2011-10-24T22:59:28Z
2011-12-15T09:11:49Z
2010
 
Type Proceedings Paper
 
Identifier 2010 INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM,841-845
978-1-4244-5431-0
http://dx.doi.org/10.1109/IRPS.2010.5488723
http://dspace.library.iitb.ac.in/xmlui/handle/10054/15536
http://hdl.handle.net/100/2309
 
Source International Reliability Physics Symposium,Monterey, CA,APR 10-14, 2011
 
Language English