Sub-20 nm gate length FinFET design : can High-kappa spacers make a difference?
DSpace at IIT Bombay
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Title |
Sub-20 nm gate length FinFET design : can High-kappa spacers make a difference?
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Creator |
SACHID, AB
FRANCIS, R BAGHINI, MS SHARMA, DK BACH, KH MAHNKOPF, R RAO, VR |
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Subject |
devices
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Description |
Sub-20 nm gate length FinFETs, are constrained by the very thin fin thickness (T(FIN)) necessary to maintain acceptable short-channel performance. For the 45 nm technology node and below, a novel device design methodology for undoped underlapped FinFETs with high-kappa spacers is presented to achieve higher circuit speed and SRAM cells with higher stability, lower leakage, faster access times and higher robustness to process variations compared to overlapped FinFETs. While comparing different FinFETs, we propose ON-current per fin as the parameter to be optimized instead of ON-current normalized to electrical width.
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Publisher |
IEEE
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Date |
2011-10-25T21:52:52Z
2011-12-15T09:12:09Z 2011-10-25T21:52:52Z 2011-12-15T09:12:09Z 2008 |
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Type |
Proceedings Paper
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Identifier |
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST,697-700
978-1-4244-2377-4 http://dspace.library.iitb.ac.in/xmlui/handle/10054/15829 http://hdl.handle.net/100/2500 |
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Source |
IEEE International Electron Devices Meeting,San Francisco, CA,DEC 15-17, 2008
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Language |
English
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