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Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection

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Title Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection
 
Creator SEENA, V
RAJORIYA, A
FERNANDES, A
DHALE, K
PANT, P
MUKHERJI, S
RAO, VR
 
Description In this paper, we report the development of a SU-8 based novel polymer composite microcantilever sensor designed for surface stress measurements. Nanoindentation study was carried out for measuring the Young's modulus of the polymer composite. A low cost process, optimized for fabrication of composite SU8 microcantilevers with thickness as small as 3 mu m is developed and characterized as part of this work. Further, this paper also demonstrates the application of this polymer composite cantilever for explosive detection with the appropriate surface coatings carried out on the polymer surface.
 
Publisher IEEE
 
Date 2011-10-27T20:41:02Z
2011-12-15T09:12:48Z
2011-10-27T20:41:02Z
2011-12-15T09:12:48Z
2010
 
Type Proceedings Paper
 
Identifier MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,851-854
978-1-4244-5764-9
1084-6999
http://dspace.library.iitb.ac.in/xmlui/handle/10054/16411
http://hdl.handle.net/100/2904
 
Source 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010),Hong Kong, PEOPLES R CHINA,JAN 24-28, 2010
 
Language English