Drain bias dependence of gate oxide reliability in conventional and asymmetrical channel MOSFETs in the low voltage regime
DSpace at IIT Bombay
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Title |
Drain bias dependence of gate oxide reliability in conventional and asymmetrical channel MOSFETs in the low voltage regime
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Creator |
ANIL, KG
MAHAPATRA, S EISELE, I RAMGOPAL RAO, V VASI, J |
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Subject |
current distribution
dielectric thin films low-power electronics doping profiles |
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Description |
Drain bias dependence of gate oxide reliability is investigated on conventional (CON) and Lateral Asymmetric Channel (LAC) MOSFETs for low drain voltages that correspond to the real operating voltages for deep-sub-micron devices. For short channel devices, the oxide reliability improves drastically as drain bias increases. Device simulations showed that the vertical field distribution in the oxide is asymmetric for non-zero drain biases and this results in an asymmetric gate current distribution with the peak at the source end. By introducing an intentionally graded doping profile along the channel (LAC), the asymmetry in the vertical filed distribution can be enhanced with consequent improvement in gate oxide reliability. |
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Publisher |
IEEE
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Date |
2009-01-05T13:00:37Z
2011-11-28T07:02:12Z 2011-12-15T09:56:50Z 2009-01-05T13:00:37Z 2011-11-28T07:02:12Z 2011-12-15T09:56:50Z 2000 |
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Type |
Article
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Identifier |
Proceeding of the 30th European Solid-State Device Research Conference, Cork, Ireland, 11-13 September 2000, 124-127
2-86332-248-6 http://hdl.handle.net/10054/547 http://dspace.library.iitb.ac.in/xmlui/handle/10054/547 |
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Language |
en
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