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Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers

DSpace at IIT Bombay

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Field Value
 
Title Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers
 
Creator KALE, NS
JOSHI, M
RAO, PN
MUKHERJI, S
RAO, VR
 
Subject hotwire cvd
microcantilever
antibody
piezo-resistive
immobilization
silanization
 
Description Methods of bio-functionalize silicon nitride involve process steps to convert it into an oxynitride via plasma implantation techniques. Such methods can potentially damage microstructures such as cantilevers. In this paper, we report successful bio-functionalization of Hotwire CVD silicon nitride-based piezo-resistive cantilevers without any oxygen plasma treatment. Process to fabricate such structures and to bio-functionalize them is discussed in detail.
 
Publisher INDIAN ACAD SCIENCES
 
Date 2011-08-01T21:08:40Z
2011-12-26T12:53:30Z
2011-12-27T05:39:42Z
2011-08-01T21:08:40Z
2011-12-26T12:53:30Z
2011-12-27T05:39:42Z
2009
 
Type Article
 
Identifier SADHANA-ACADEMY PROCEEDINGS IN ENGINEERING SCIENCES, 34(4), 591-597
0256-2499
http://dx.doi.org/10.1007/s12046-009-0036-7
http://dspace.library.iitb.ac.in/xmlui/handle/10054/8546
http://hdl.handle.net/10054/8546
 
Language en