Record Details

Polymer microcantilever biochemical sensors with integrated polymer composites for electrical detection

DSpace at IIT Bombay

View Archive Info
 
 
Field Value
 
Title Polymer microcantilever biochemical sensors with integrated polymer composites for electrical detection
 
Creator SEENA, V
RAJORYA, A
PANT, P
MUKHERJI, S
RAO, VR
 
Subject su-8
immobilization
biosensing
microcantilever
gauge factor
young's modulus
piezoresistor
polymer
su-8
polymer carbon black composite
 
Description Micro fabricated sensors based on nanomechanical motion with piezoresistive electrical readout have become a promising biochemical sensing tool. The conventional microcantilever materials are mostly silicon-based. The sensitivity of the sensor depends on Young's modulus of the structural material, thickness of the cantilever as well as on the gauge factor of the piezoresistor. UV patternable polymers such as SU-8 have a very low Young's modulus compared to the silicon-based materials. Polymer cantilevers with a piezoresistive material having a large gauge factor and a lower Young's modulus are therefore highly suited for sensing applications. In this work, a spin coatable and photopatternable mixture of carbon black (CB) and SU-8, with proper dispersion characteristics, has been demonstrated as a piezoresistive thin film for polymer microcantilevers. Results on percolation experiments of SU-8/CB composite and fabrication of piezoresistive SU-8 microcantilevers using this composite are presented. With our controlled dispersion experiments, we could get a uniform piezoresistive thin film of thickness less than 1.2 mu m and resistivity of 2.7 Omega cm using 10 wt% of CB in SU-8. The overall thickness of the SU-8/composite/SU-8 is approximately 3 pm. We further present results on the electromechanical characterization and biofunctionalization of the cantilever structures for biochemical sensing applications. These cantilevers show a deflection sensitivity of 0.55 ppm/nm. Since the surface stress sensitivity is 4.1 x 10(-3) [N/m](-1), these cantilevers can well be used for detection of protein markers for pathological applications. (C) 2009 Elsevier Masson SAS. .
 
Publisher ELSEVIER SCIENCE BV
 
Date 2011-07-26T11:24:07Z
2011-12-26T12:54:12Z
2011-12-27T05:41:48Z
2011-07-26T11:24:07Z
2011-12-26T12:54:12Z
2011-12-27T05:41:48Z
2009
 
Type Article
 
Identifier SOLID STATE SCIENCES, 11(9), 1606-1611
1293-2558
http://dx.doi.org/10.1016/j.solidstatesciences.2009.06.009
http://dspace.library.iitb.ac.in/xmlui/handle/10054/6889
http://hdl.handle.net/10054/6889
 
Language en