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Structure and normal incidence soft-x-ray reflectivity of Ni-Nb/C amorphous multilayers

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Title Structure and normal incidence soft-x-ray reflectivity of Ni-Nb/C amorphous multilayers
 
Creator VITTA, S
METZGER, TH
PEISL, J
 
Subject interfacial roughness
thin-films
silicon
microstructure
microscopy
mirrors
soft x rays
multilayers
x-ray microscopy
 
Description Multilayers for the water window region of the soft x rays have been prepared by pulsed laser ablation with amorphous Ni50Nb50 and amorphous C. The structural characterization of the multilayers, period d = 2.41 nm, shows that the interfaces are sharp with a roughness of only 0.4 nm that is chemical, not morphological, in origin. The interface roughness was found to be uncorrelated in the direction normal to the plane of the film. The normal incidence soft-x-ray reflectivity of the multilayer at 4.85-nm wavelength is 0.06%, 1 order of magnitude lower than the theoretically predicted value. However, the resolution limit lambda/Delta lambda of the multilayer was found to be 16.7, close to the theoretically predicted value. (C) 1997 Optical Society of America.
 
Publisher OPTICAL SOC AMER
 
Date 2011-08-19T11:02:11Z
2011-12-26T12:56:12Z
2011-12-27T05:44:32Z
2011-08-19T11:02:11Z
2011-12-26T12:56:12Z
2011-12-27T05:44:32Z
1997
 
Type Article
 
Identifier APPLIED OPTICS, 36(7), 1472-1481
0003-6935
http://dx.doi.org/10.1364/AO.36.001472
http://dspace.library.iitb.ac.in/xmlui/handle/10054/10328
http://hdl.handle.net/10054/10328
 
Language en