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HIGH-FREQUENCY PERFORMANCE OF TA-AL-N CAPACITORS MADE WITH AN ALUMINUM UNDERLAYER

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Title HIGH-FREQUENCY PERFORMANCE OF TA-AL-N CAPACITORS MADE WITH AN ALUMINUM UNDERLAYER
 
Creator REDDY, PK
JAWALEKAR, SR
 
Publisher ELSEVIER SCIENCE SA LAUSANNE
 
Date 2011-07-29T08:14:58Z
2011-12-26T12:48:34Z
2011-12-27T05:44:54Z
2011-07-29T08:14:58Z
2011-12-26T12:48:34Z
2011-12-27T05:44:54Z
1983
 
Type Article
 
Identifier THIN SOLID FILMS, 109(4), 339-343
0040-6090
http://dx.doi.org/10.1016/0040-6090(83)90186-4
http://dspace.library.iitb.ac.in/xmlui/handle/10054/7644
http://hdl.handle.net/10054/7644
 
Language en