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A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS

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Title A novel dry method for surface modification of SU-8 for immobilization of biomolecules in Bio-MEMS
 
Creator JOSHI, M
KALE, NITIN
LAL, RAKESH
RAMGOPAL RAO, V
MUKHERJI, SOUMYA
 
Subject microsystems
pyrolysis
surface treatment
chemical vapor deposition
ammonia
 
Description SU-8 has been primarily used for structural elements and microfludics components in MEMS. Microsystems for biological applications require immobilization of biomolecules on the MEMS structures. In order to functionalize SU-8 for such purposes, the surface needs to be modified. In this paper, we report a novel dry method of surface modification of SU-8 which is compatible with standard microfabrication techniques. The surface obtained by spin coating SU-8 (2002) on silicon wafer was modified by grafting amine groups using pyrolytic dissociation of ammonia in a hotwire CVD setup. To demonstrate the presence of amine groups on modified SU-8 surface, the surface characteristic after modification was assessed using Fourier transform infrared spectroscopy. The change in SU-8 surface morphology before and after surface modification was investigated using atomic force microscopy. To show the utility of this process for application in Bio-MEMS, SU-8 microcantilevers were fabricated and subjected to the same surface modification protocol. Following this, the cantilevers were incubated first in a suspension of human immunoglobulin (HIgG) and then in FITC tagged goat anti-human IgG in order to demonstrate the utility of the surface modification performed. The efficacy of the process was assessed by observing the cantilevers under a fluorescence microscope.
 
Publisher Elsevier
 
Date 2009-04-23T11:41:14Z
2011-12-08T06:25:22Z
2011-12-26T13:01:32Z
2011-12-27T05:45:08Z
2009-04-23T11:41:14Z
2011-12-08T06:25:22Z
2011-12-26T13:01:32Z
2011-12-27T05:45:08Z
2007
 
Type Article
 
Identifier Biosensors and Bioelectronics 22(11), 2429-2435
0956-5663
10.1016/j.bios.2006.08.045
http://hdl.handle.net/10054/1217
http://dspace.library.iitb.ac.in/xmlui/handle/10054/1217
 
Language en