DETERMINATION OF CONTACT RESISTIVITY BY A MODIFIED COX AND STRACK METHOD IN CASE OF FINITE METAL SHEET RESISTANCE
DSpace at IIT Bombay
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Title |
DETERMINATION OF CONTACT RESISTIVITY BY A MODIFIED COX AND STRACK METHOD IN CASE OF FINITE METAL SHEET RESISTANCE
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Creator |
AHMAD, M
GANGULI, T PATIL, S MAJOR, S PATRO, YGK ARORA, BM |
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Description |
This paper presents theoretical and experimental results concerning resistance of contact metal as a source of error in the detemination of specific contact resistance of ohmic contacts to semiconductor utilising Cox and Strack geometry. It is shown that a non-zero sheet resistance of metal overlay can significantly alter the value of effective contact resistance.
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Publisher |
PERGAMON-ELSEVIER SCIENCE LTD
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Date |
2011-08-24T00:55:48Z
2011-12-26T12:56:40Z 2011-12-27T05:45:44Z 2011-08-24T00:55:48Z 2011-12-26T12:56:40Z 2011-12-27T05:45:44Z 1995 |
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Type |
Article
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Identifier |
SOLID-STATE ELECTRONICS, 38(8), 1437-1440
0038-1101 http://dx.doi.org/10.1016/0038-1101(94)00282-K http://dspace.library.iitb.ac.in/xmlui/handle/10054/10707 http://hdl.handle.net/10054/10707 |
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Language |
en
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