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Compositional characterization of CrN films deposited by ion beam-assisted deposition process on stainless steel

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Title Compositional characterization of CrN films deposited by ion beam-assisted deposition process on stainless steel
 
Creator KUMAR, S
RAJU, VS
SHEKHAR, R
ARUNACHALAM, J
KHANNA, AS
PRASAD, KG
 
Subject wear-resistance
silicon
ion beam-assisted deposition
chromium nitride
rutherford backscattering spectrometry
glow discharge mass spectrometry
 
Description Thin films of technologically important chromium nitride, prepared using ion beam-assisted deposition (IBAD) on stainless steel, have been characterized for their composition and thickness by backscattering spectrometry and glow discharge mass spectrometry (GDMS). The composition of the films was determined by non-resonant N-14(p,p)N-14 backscattering using 1.6-1.73 MeV protons. The proton resonance N-14(p,p)N-14 scattering at E-p = 1.74 MeV and 3 MeV alpha -particle backscattering were used to measure the thickness of the films. The composition and thickness of the films estimated by the GDMS method are consistent with backscattering measurements. The factors leading to the formation of the peak observed at the iron edge of the: substrate in the backscattered spectra for both projectiles have been investigated. (C) 2001 Elsevier Science B,V. .
 
Publisher ELSEVIER SCIENCE SA
 
Date 2011-07-27T17:53:43Z
2011-12-26T12:57:53Z
2011-12-27T05:45:57Z
2011-07-27T17:53:43Z
2011-12-26T12:57:53Z
2011-12-27T05:45:57Z
2001
 
Type Article
 
Identifier THIN SOLID FILMS, 388(1-2), 195-200
0040-6090
http://dx.doi.org/10.1016/S0040-6090(01)00849-5
http://dspace.library.iitb.ac.in/xmlui/handle/10054/7289
http://hdl.handle.net/10054/7289
 
Language en