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Enhancement of (100) texture in diamond films grown using a temperature gradient

DSpace at IIT Bombay

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Title Enhancement of (100) texture in diamond films grown using a temperature gradient
 
Creator TITUS, E
SIKDER, AK
PALTNIKAR, U
SINGH, MANOJ K
MISRA, DS
 
Subject chemical vapor deposition
crystal orientation
fourier transform infrared spectroscopy
hydrogen
pressure effects
scanning electron microscopy
 
Description Diamond films with dominant (100) texture were grown with a temperature gradient across the Si (100) substrates using hot filament chemical vapor deposition technique. Deposition was carried out with 0.8% CH4 in balance hydrogen at an average substrate temperature of 880°C. The deposition pressure was varied between 20-120 torr. Films were characterized using X-ray diffraction (XRD), scanning electron microscopy (SEM) and Fourier Transform Infrared Spectroscopy (FTIR). XRD shows very strong (400) reflection in all the samples. SEM results show a smooth diamond surface comprised of (100) platelets. As the (100) diamond plates were grown on top of the (100) oriented silicon substrate the faces are more or less aligned parallel with the substrate surface, resulting in a relatively smoother diamond surfaces. FTIR studies show novel features in the films. Quantitative analysis was carried out to measure the H content in the films.
 
Publisher Elsevier
 
Date 2009-04-28T05:25:06Z
2011-12-08T06:38:58Z
2011-12-26T13:01:43Z
2011-12-27T05:46:23Z
2009-04-28T05:25:06Z
2011-12-08T06:38:58Z
2011-12-26T13:01:43Z
2011-12-27T05:46:23Z
2002
 
Type Article
 
Identifier Diamond and Related Materials 11(7), 1403-1408
0925-9635
10.1016/S0925-9635(02)00033-X
http://hdl.handle.net/10054/1258
http://dspace.library.iitb.ac.in/xmlui/handle/10054/1258
 
Language en