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Effect of deposition conditions on the microstructure and gas-sensing characteristics of Te thin films

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Title Effect of deposition conditions on the microstructure and gas-sensing characteristics of Te thin films
 
Creator BHANDARKAR, V
SEN, S
MUTHE, KP
KAUR, M
KUMAR, MS
DESHPANDE, SK
GUPTA, SK
YAKHMI, JV
SAHNI, VC
 
Subject sensor
temperature
growth
tellurium thin film
microstructure
h2s
no2
gas sensor
 
Description Effect of deposition temperature, post-deposition annealing and substrate crystallinity on the microstructure and gas sensitivity of tellurium thin films has been investigated. As the substrate temperature during deposition is increased, due to increased mobility of adatoms, microstructure of films gradually changes from a smooth amorphous nature at low temperatures to polycrystalline films showing dendritic growth at high temperatures. It is also seen that improvement in crystalline nature of substrate leads to enhancement in grain size of the deposited films. Post-deposition annealing is found to have much less influence on the film morphology compared to films deposited on heated substrates. For films deposited at same temperature (on different substrates), gas sensitivity improves with reduction in the grain size. This has been attributed to increase in effective surface area for gas-film interaction. On the contrary, for films deposited at different temperatures, increase in grain size (higher deposition temperature) leads to better sensitivity. This has been understood to arise from reduced intragrain defect density. Small grain size and reduced defect density are seen to be conducive to better gas sensitivity of the films. (c) 2006
 
Publisher ELSEVIER SCIENCE SA
 
Date 2011-07-27T20:01:34Z
2011-12-26T12:58:11Z
2011-12-27T05:47:42Z
2011-07-27T20:01:34Z
2011-12-26T12:58:11Z
2011-12-27T05:47:42Z
2006
 
Type Article
 
Identifier MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 131(1-3), 156-161
0921-5107
http://dx.doi.org/10.1016/j.mseb.2006.04.017
http://dspace.library.iitb.ac.in/xmlui/handle/10054/7313
http://hdl.handle.net/10054/7313
 
Language en