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Modeling of electrochemical micromachining: comparison to experiments

DSpace at IIT Bombay

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Title Modeling of electrochemical micromachining: comparison to experiments
 
Creator MARLA, D
JOSHI, SS
MITRA, SK
 
Subject ultrashort voltage pulses
numerical-simulation
machining pecm
electrochemical machining (ecm)
electrochemical micromachining (emm)
electric field
electric double layer (edl)
 
Description A detailed theoretical modeling of the electrochemical micromachining (EMM) process has been conducted here. The model takes into account a very small interelectrode gap thickness (order of a few micrometers) under which the electric field between the electrodes becomes a predominant factor in governing the machining process. The effect of electric double layer (EDL) also becomes significant under such conditions. The governing equations of the material removal rate are derived by considering a one-dimensional electric field, which is perpendicular to the cross section of the electrode. The model also incorporates the applied pulsed voltage used in EMM. A comparison between the theoretical and the experimental results indicate that, under high voltage and small interelectrode gap, the electric field and the formation of EDL have a significant effect on the material removal rate. c 2008 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.2964215]
 
Publisher SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS
 
Date 2011-08-29T07:59:29Z
2011-12-26T12:58:30Z
2011-12-27T05:48:33Z
2011-08-29T07:59:29Z
2011-12-26T12:58:30Z
2011-12-27T05:48:33Z
2008
 
Type Article
 
Identifier JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 7(3), -
1932-5150
http://dx.doi.org/10.1117/1.2964215
http://dspace.library.iitb.ac.in/xmlui/handle/10054/12021
http://hdl.handle.net/10054/12021
 
Language en