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PROPERTIES OF THIN-FILM CAPACITORS MADE WITH REACTIVELY SPUTTERED TA-AL

DSpace at IIT Bombay

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Field Value
 
Title PROPERTIES OF THIN-FILM CAPACITORS MADE WITH REACTIVELY SPUTTERED TA-AL
 
Creator REDDY, PK
BHAGAVAT, GK
JAWALEKAR, SR
 
Publisher ELSEVIER SCIENCE SA LAUSANNE
 
Date 2011-07-29T12:15:16Z
2011-12-26T12:48:41Z
2011-12-27T05:49:56Z
2011-07-29T12:15:16Z
2011-12-26T12:48:41Z
2011-12-27T05:49:56Z
1980
 
Type Article
 
Identifier THIN SOLID FILMS, 72(3), 443-448
0040-6090
http://dx.doi.org/10.1016/0040-6090(80)90528-3
http://dspace.library.iitb.ac.in/xmlui/handle/10054/7704
http://hdl.handle.net/10054/7704
 
Language en