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Macroporous silicon based capacitive affinity sensor-fabrication and electrochemical studies

DSpace at IIT Bombay

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Title Macroporous silicon based capacitive affinity sensor-fabrication and electrochemical studies
 
Creator BETTY, CA
LAL, R
SHARMA, DK
YAKHMI, JV
MITTAL, JP
 
Subject porous silicon
oxidation
macroporous silicon
capacitance
impedance spectroscopy
affinity
sensor
 
Description We report the fabrication and characterization of capacitive immunosensors based on electrolyte-insulator-porous silicon (EIS) structures. The sensor structure, gold\silicon\porous silicon\SiO2\aminosilane\glutaraldehyde\antibody\phosphate-buffered-saline (PBS)\platinum, is fabricated with a low thermal budget process and is found to be five times more sensitive than an immunosensor on polished silicon with identical die area. Macroporous silicon was prepared by electrochemical etching of polished (100) oriented p-type silicon wafers and characterized using SEM, optical microscopy, cyclic voltammetry and impedance spectroscopy. Columnar macroporous structures of different column densities and column sizes were used as the sensor substrates. The capacitive immunosensors were fabricated by anodic oxidation of these porous silicon substrates to form oxide followed by covalent immobilization of antibody (mouse IgG). Antibody-analyte (goat anti-mouse IgG) interactions were monitored via fluorescence microscopy and by change in the measured capacitance. Sensor response was dependent on both the porous silicon column structure and oxide quality. (C) 2003
 
Publisher ELSEVIER SCIENCE SA
 
Date 2011-07-28T11:45:33Z
2011-12-26T12:59:15Z
2011-12-27T05:50:20Z
2011-07-28T11:45:33Z
2011-12-26T12:59:15Z
2011-12-27T05:50:20Z
2004
 
Type Article
 
Identifier SENSORS AND ACTUATORS B-CHEMICAL, 97(2-3), 334-343
0925-4005
http://dx.doi.org/10.1016/j.snb.2003.09.008
http://dspace.library.iitb.ac.in/xmlui/handle/10054/7392
http://hdl.handle.net/10054/7392
 
Language en