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Fabrication and characterization of a polymeric microcantilever with an encapsulated hotwire CVD polysilicon piezoresistor

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Title Fabrication and characterization of a polymeric microcantilever with an encapsulated hotwire CVD polysilicon piezoresistor
 
Creator KALE, NS
NAG, S
PINTO, RICHARD
RAMGOPAL RAO, V
 
Subject atomic force microscopy
electromechanical devices
surface properties
organic polymers
stresses
 
Description We demonstrate a novel photoplastic nanoelectromechanical device that includes an encapsulated polysilicon piezoresistor. The temperature limitation that typically prevents deposition of polysilicon films on polymers was overcome by employing a hotwire CVD process. In this paper, we report the use of this process to fabricate and characterize a novel polymeric cantilever with an embedded piezoresistor. This device exploits the low Young's modulus of organic polymers and the high gauge factor of polysilicon. The fabricated device fits into the cantilever holder of an atomic force microscope (AFM) and can be used in conjunction with the AFM's liquid cell for detecting the adsorption of biochemicals. It enables differential measurement while preventing biochemicals from interfering with measurements using the piezoresistor. The mechanical and electromechanical characterization of the device is also reported in this paper.
 
Publisher IEEE
 
Date 2009-02-10T05:27:17Z
2011-11-25T16:36:51Z
2011-12-26T13:05:48Z
2011-12-27T05:53:37Z
2009-02-10T05:27:17Z
2011-11-25T16:36:51Z
2011-12-26T13:05:48Z
2011-12-27T05:53:37Z
2009
 
Type Article
 
Identifier Journal of Microelectromechanical Systems 18(1), 79-87
1057-7157
http://dx.doi.org/10.1109/JMEMS.2008.2008577
http://hdl.handle.net/10054/606
http://dspace.library.iitb.ac.in/xmlui/handle/10054/606
 
Language en