Fabrication and characterization of a polymeric microcantilever with an encapsulated hotwire CVD polysilicon piezoresistor
DSpace at IIT Bombay
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Title |
Fabrication and characterization of a polymeric microcantilever with an encapsulated hotwire CVD polysilicon piezoresistor
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Creator |
KALE, NS
NAG, S PINTO, RICHARD RAMGOPAL RAO, V |
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Subject |
atomic force microscopy
electromechanical devices surface properties organic polymers stresses |
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Description |
We demonstrate a novel photoplastic nanoelectromechanical device that includes an encapsulated polysilicon piezoresistor. The temperature limitation that typically prevents deposition of polysilicon films on polymers was overcome by employing a hotwire CVD process. In this paper, we report the use of this process to fabricate and characterize a novel polymeric cantilever with an embedded piezoresistor. This device exploits the low Young's modulus of organic polymers and the high gauge factor of polysilicon. The fabricated device fits into the cantilever holder of an atomic force microscope (AFM) and can be used in conjunction with the AFM's liquid cell for detecting the adsorption of biochemicals. It enables differential measurement while preventing biochemicals from interfering with measurements using the piezoresistor. The mechanical and electromechanical characterization of the device is also reported in this paper.
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Publisher |
IEEE
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Date |
2009-02-10T05:27:17Z
2011-11-25T16:36:51Z 2011-12-26T13:05:48Z 2011-12-27T05:53:37Z 2009-02-10T05:27:17Z 2011-11-25T16:36:51Z 2011-12-26T13:05:48Z 2011-12-27T05:53:37Z 2009 |
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Type |
Article
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Identifier |
Journal of Microelectromechanical Systems 18(1), 79-87
1057-7157 http://dx.doi.org/10.1109/JMEMS.2008.2008577 http://hdl.handle.net/10054/606 http://dspace.library.iitb.ac.in/xmlui/handle/10054/606 |
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Language |
en
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