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Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si

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Title Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si
 
Creator PRASHANTHI, K
MANDAL, M
DUTTAGUPTA, SP
PINTO, R
PALKAR, VR
 
Subject PIEZOELECTRIC THIN-FILMS
PZT FILMS
INTEGRATION
CONSTANTS
ACTUATOR
DEVICES
Multiferroics
Piezoelectric properties
Microcantilevers
 
Description In this paper, the fabrication and characterization of a novel magnetoelectric multiferroic (Dy modified BiFeO(3) or BDFO) MEMS cantilevers fabricated directly on Si have been reported for the first time ever. The functioning of BDFO microcantilevers has been tested in the presence of electric field as well as magnetic field. The transverse piezoelectric coefficients d(31) and e(31) of the BDFO films measured from the deflection of the cantilever under applied voltage were -40 pm/V and -5.63 C/m(2) respectively. The piezoelectric properties of BDFO films are similar to that reported for lead zirconate titanate (PZT), while offering additional flexibility in designing and operating MEMS devices. (C) 2010 Elsevier B.V. All rights reserved.
 
Publisher ELSEVIER SCIENCE SA
 
Date 2012-06-26T08:30:38Z
2012-06-26T08:30:38Z
2011
 
Type Article
 
Identifier SENSORS AND ACTUATORS A-PHYSICAL,166(1)83-87
0924-4247
http://dx.doi.org/10.1016/j.sna.2010.12.013
http://dspace.library.iitb.ac.in/jspui/handle/100/14186
 
Language English