Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si
DSpace at IIT Bombay
View Archive InfoField | Value | |
Title |
Fabrication and characterization of a novel magnetoelectric multiferroic MEMS cantilevers on Si
|
|
Creator |
PRASHANTHI, K
MANDAL, M DUTTAGUPTA, SP PINTO, R PALKAR, VR |
|
Subject |
PIEZOELECTRIC THIN-FILMS
PZT FILMS INTEGRATION CONSTANTS ACTUATOR DEVICES Multiferroics Piezoelectric properties Microcantilevers |
|
Description |
In this paper, the fabrication and characterization of a novel magnetoelectric multiferroic (Dy modified BiFeO(3) or BDFO) MEMS cantilevers fabricated directly on Si have been reported for the first time ever. The functioning of BDFO microcantilevers has been tested in the presence of electric field as well as magnetic field. The transverse piezoelectric coefficients d(31) and e(31) of the BDFO films measured from the deflection of the cantilever under applied voltage were -40 pm/V and -5.63 C/m(2) respectively. The piezoelectric properties of BDFO films are similar to that reported for lead zirconate titanate (PZT), while offering additional flexibility in designing and operating MEMS devices. (C) 2010 Elsevier B.V. All rights reserved.
|
|
Publisher |
ELSEVIER SCIENCE SA
|
|
Date |
2012-06-26T08:30:38Z
2012-06-26T08:30:38Z 2011 |
|
Type |
Article
|
|
Identifier |
SENSORS AND ACTUATORS A-PHYSICAL,166(1)83-87
0924-4247 http://dx.doi.org/10.1016/j.sna.2010.12.013 http://dspace.library.iitb.ac.in/jspui/handle/100/14186 |
|
Language |
English
|
|