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ZnO Nanowire Embedded Strain Sensing Cantilever: A New Ultra-Sensitive Technology Platform

DSpace at IIT Bombay

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Title ZnO Nanowire Embedded Strain Sensing Cantilever: A New Ultra-Sensitive Technology Platform
 
Creator RAY, P
RAO, VR
 
Subject Microcantilever
ZnO nanowire
sensor
MECHANICAL SENSOR
OPTIMIZATION
GROWTH
 
Description A novel ultra sensitive micro-cantilever-based technology platform was developed in this letter for strain sensing applications. Sensing mechanism is based on electrical conduction through the ZnO nanowires embedded inside a SU-8 polymer cantilever beam. The lower Young's modulus of the polymer and the higher strain sensitivity of ZnO nanowires are used to improve the performance of these micro-cantilever devices. Deflection sensitivity of this technology is measured to be 128 ppm/nm. Besides the electromechanical characterization, mechanical characterization has also been performed to measure the resonant frequency of these microcantilever devices, which is shown to be in a few tens of kilohertz range, suitable for nanomechanical sensing applications. [2013-0053]
 
Publisher IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 
Date 2014-10-15T11:52:04Z
2014-10-15T11:52:04Z
2013
 
Type Article
 
Identifier JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 22(5)995-997
1057-7157
1941-0158
http://dx.doi.org/10.1109/JMEMS.2013.2262601
http://dspace.library.iitb.ac.in/jspui/handle/100/14834
 
Language en