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A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications

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Title A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
 
Creator PRASHANTHI, K
NARESH, M
SEENA, V
THUNDAT, T
RAO, VR
 
Subject Microelectromechanical systems (MEMS)
nanocomposites
piezoelectric
SU-8 polymer
ZnO
CANTILEVERS
SENSORS
 
Description This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.
 
Publisher IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 
Date 2014-10-15T12:48:08Z
2014-10-15T12:48:08Z
2012
 
Type Article
 
Identifier JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(2)259-261
http://dx.doi.org/10.1109/JMEMS.2011.2178118
http://dspace.library.iitb.ac.in/jspui/handle/100/14926
 
Language en