A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
DSpace at IIT Bombay
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Title |
A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
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Creator |
PRASHANTHI, K
NARESH, M SEENA, V THUNDAT, T RAO, VR |
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Subject |
Microelectromechanical systems (MEMS)
nanocomposites piezoelectric SU-8 polymer ZnO CANTILEVERS SENSORS |
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Description |
This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.
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Publisher |
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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Date |
2014-10-15T12:48:08Z
2014-10-15T12:48:08Z 2012 |
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Type |
Article
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Identifier |
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(2)259-261
http://dx.doi.org/10.1109/JMEMS.2011.2178118 http://dspace.library.iitb.ac.in/jspui/handle/100/14926 |
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Language |
en
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