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Raman spectroscopy of silicon-nanocrystals fabricated by inductively coupled plasma chemical vapor deposition

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Title Raman spectroscopy of silicon-nanocrystals fabricated by inductively coupled plasma chemical vapor deposition
 
Creator MAVILLA, NR
SOLANKI, CS
VASI, J
 
Subject Inductively coupled plasma enhanced CVD
Silicon-nanocrystal
Optical phonon confinement
SOLAR-CELLS
SI/SIO2 SUPERLATTICES
LUMINESCENCE
EFFICIENCY
SIZE
CRYSTALLIZATION
CONDUCTIVITY
NANOCLUSTERS
ENHANCEMENT
VOLTAGE
 
Description Size dependent properties of nanostructures - quantum confinement effect, optical phonon confinement, multiexciton generation - prompted extensive research of good old silicon, at nanoscale dimensions, for potential applications in next generation device applications. However, for realizing functional devices, a thorough understanding of size related properties and a viable fabrication method are crucial. In this study, we present a thorough Raman analysis of silicon-nanocrystals (Si-NCs) of various sizes fabricated by inductively coupled plasma enhanced CVD (ICPCVD). Si-NCs were realized using a two-step process for tight size control; initially alternating multilayers of SiOx < 2 (SRO) and SiO2 were deposited by ICPCVD, followed by high temperature annealing for phase-separation and crystallization. To study the optical phonon confinement, a series of five multilayer samples with thickness of SRO sublayer (T-SRO) varying from 10 nm to 2 nm were fabricated. Raman spectra for ML samples with T-SRO >= 6 nm exhibited three notable features; a red-shifted sharp peak compared to c-Si, a broad asymmetric shoulder on the lower frequency side and a grain boundary band related to the interface between Si-NCs and SiO2. These features confirm the formation of Si-NCs in SRO sublayers. ML samples with T-SRO
 
Publisher ELSEVIER SCIENCE BV
 
Date 2014-10-15T15:53:58Z
2014-10-15T15:53:58Z
2013
 
Type Article
 
Identifier PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 5259-64
1386-9477
1873-1759
http://dx.doi.org/10.1016/j.physe.2013.03.019
http://dspace.library.iitb.ac.in/jspui/handle/100/15204
 
Language en