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Analytical Model to Predict Temperature Distribution and Ablation Depth in Excimer Laser Micromachining

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Field Value
 
Title Analytical Model to Predict Temperature Distribution and Ablation Depth in Excimer Laser Micromachining
 
Creator MARLA, D
BARDE, V
JOSHI, SS
 
Subject Laser ablation
Excimer laser
Micromachining
Analytical model
Multiple pulses
COPPER
SILICON
SIZE
 
Description An analytical model to predict the temperature distribution and ablation depth in excimer laser ablation process by solving one-dimensional heat conduction equation has been proposed. The model takes into account aspects like temperature dependent thermal properties for polycarbonate material and re-solidification during pulse off-time. The effects of fluence and number of pulses with and without consideration to the temperature dependent thermal conductivity and pulse delay have been investigated. It is observed that consideration to temperature dependent thermal conductivity and re-solidification during pulse 'off-time' results in an appreciable improvement in the accuracy of ablation depth prediction and the error being within +/- 0.8 mu m.
 
Publisher KOREAN SOC PRECISION ENG
 
Date 2014-10-15T16:37:11Z
2014-10-15T16:37:11Z
2013
 
Type Article
 
Identifier INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 14(1)29-36
http://dx.doi.org/10.1007/s12541-013-0005-2
http://dspace.library.iitb.ac.in/jspui/handle/100/15227
 
Language en