Analytical Model to Predict Temperature Distribution and Ablation Depth in Excimer Laser Micromachining
DSpace at IIT Bombay
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Title |
Analytical Model to Predict Temperature Distribution and Ablation Depth in Excimer Laser Micromachining
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Creator |
MARLA, D
BARDE, V JOSHI, SS |
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Subject |
Laser ablation
Excimer laser Micromachining Analytical model Multiple pulses COPPER SILICON SIZE |
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Description |
An analytical model to predict the temperature distribution and ablation depth in excimer laser ablation process by solving one-dimensional heat conduction equation has been proposed. The model takes into account aspects like temperature dependent thermal properties for polycarbonate material and re-solidification during pulse off-time. The effects of fluence and number of pulses with and without consideration to the temperature dependent thermal conductivity and pulse delay have been investigated. It is observed that consideration to temperature dependent thermal conductivity and re-solidification during pulse 'off-time' results in an appreciable improvement in the accuracy of ablation depth prediction and the error being within +/- 0.8 mu m.
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Publisher |
KOREAN SOC PRECISION ENG
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Date |
2014-10-15T16:37:11Z
2014-10-15T16:37:11Z 2013 |
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Type |
Article
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Identifier |
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 14(1)29-36
http://dx.doi.org/10.1007/s12541-013-0005-2 http://dspace.library.iitb.ac.in/jspui/handle/100/15227 |
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Language |
en
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