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Effect of Electrolyte on the Performance of Anodic Titania Metal-Insulator-Metal Capacitors

DSpace at IIT Bombay

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Field Value
 
Title Effect of Electrolyte on the Performance of Anodic Titania Metal-Insulator-Metal Capacitors
 
Creator KARTHIK, R
KANNADASSAN, D
BAGHINI, MS
MALLICK, PS
 
Subject Anodization
High-k
MIM capacitor
Titania
Frequency Dependent Capacitance
OXIDE FILMS
ALUMINA
DENSITY
TIO2
 
Description In this paper, we report the fabrication of TiO2 metal insulator metal capacitor using various electrolytes in anodization process. The capacitors exhibit a high capacitance density of >30 fF/mu m(2). We have discussed the effect of different electrolyte solutions on the electrical and structural properties of anodized TiO2 MIM Capacitors.
 
Publisher AMER SCIENTIFIC PUBLISHERS
 
Date 2014-10-16T06:54:10Z
2014-10-16T06:54:10Z
2013
 
Type Article
 
Identifier JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 8(3)311-315
http://dx.doi.org/10.1166/jno.2013.1468
http://dspace.library.iitb.ac.in/jspui/handle/100/15485
 
Language en