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Nanostructured metal-insulator-metal capacitor with anodic titania

DSpace at IIT Bombay

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Title Nanostructured metal-insulator-metal capacitor with anodic titania
 
Creator KANNADASSAN, D
KARTHIK, R
BAGHINI, MS
MALLICK, PS
 
Subject Anodization
Dielectric polarization
Frequency dependent capacitance
Leakage mechanisms
Crystalline properties
MIM CAPACITORS
HIGH-DENSITY
OXIDE-FILMS
THIN-FILMS
PERFORMANCE
OXIDATION
 
Description This paper presents fabrication and electrical characterization of barrier type TiO2 metal-insulator-metal (MIM) capacitor using anodization. Polarization process, conduction mechanisms, and structural properties are studied in detail. We found that the anodization voltage played a major role in electrical and structural properties of the thin film. The barrier type anodic TiO2 is suggested as a dielectric material for high-performance MIM capacitors. (c) 2012 Elsevier Ltd. All rights reserved.
 
Publisher ELSEVIER SCI LTD
 
Date 2014-10-16T07:00:41Z
2014-10-16T07:00:41Z
2013
 
Type Article
 
Identifier MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 16(2)274-281
1369-8001
1873-4081
http://dx.doi.org/10.1016/j.mssp.2012.10.013
http://dspace.library.iitb.ac.in/jspui/handle/100/15498
 
Language en