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Current Excitation Method for Delta R Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution

DSpace at IIT Bombay

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Title Current Excitation Method for Delta R Measurement in Piezo-Resistive Sensors With a 0.3-ppm Resolution
 
Creator GILDA, NA
NAG, S
PATIL, S
BAGHINI, MS
SHARMA, DK
RAO, VR
 
Subject Bidirectional current source
cantilevers
current excitation
piezo resistivity
sensitivity
Wheatstone's bridge
MICROCANTILEVER
INTERFACE
FREQUENCY
CIRCUIT
 
Description This paper presents a new highly sensitive (10 mu V/ppm) bidirectional current excitation method for piezo-resistive sensor measurements, through excitation of two half bridges for Delta R measurement. The proposed circuit is insensitive to thermoelectric and stray noise effects since it measures the peak-to-peak value of the generated voltage. Measurement results using resistors show that variations as low as 0.3 ppm are measurable from 15 degrees C to 80 degrees C with resistors. As an experimental application, 40 parts per billion variation in gas concentration using piezo-resistive SU-8 microcantilevers is measured by the proposed circuit at room temperature.
 
Publisher IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 
Date 2014-10-16T13:31:31Z
2014-10-16T13:31:31Z
2012
 
Type Article
 
Identifier IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 61(3)767-774
http://dx.doi.org/10.1109/TIM.2011.2172118
http://dspace.library.iitb.ac.in/jspui/handle/100/15672
 
Language en