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Nano-scale NiSi and n-type silicon based Schottky barrier diode as a near infra-red detector for room temperature operation

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Title Nano-scale NiSi and n-type silicon based Schottky barrier diode as a near infra-red detector for room temperature operation
 
Creator ROY, S
MIDYA, K
DUTTAGUPTA, SP
RAMAKRISHNAN, D
 
Subject OPTICAL-PROPERTIES
NICKEL SILICIDES
THIN-FILMS
PHOTODETECTORS
INTERFACES
HEIGHT
 
Description The fabrication of nano-scale NiSi/n-Si Schottky barrier diode by rapid thermal annealing process is reported. The characterization of the nano-scale NiSi film was performed using Micro-Raman Spectroscopy and X-ray Photoelectron Spectroscopy (XPS). The thickness of the film (27nm) has been measured by cross-sectional Secondary Electron Microscopy and XPS based depth profile method. Current-voltage (I-V) characteristics show an excellent rectification ratio (I-ON/I-OFF = 10(5)) at a bias voltage of +/- 1V. The diode ideality factor is 1.28. The barrier height was also determined independently based on I-V (0.62 eV) and high frequency capacitance-voltage technique (0.76 eV), and the correlation between them has explained. The diode photo-response was measured in the range of 1.35-2.5 mu m under different reverse bias conditions (0.0-1.0 V). The response is observed to increase with increasing reverse bias. From the photo-responsivity study, the zero bias barrier height was determined to be 0.54 eV. (C) 2014 AIP Publishing LLC.
 
Publisher AMER INST PHYSICS
 
Date 2014-12-28T11:02:22Z
2014-12-28T11:02:22Z
2014
 
Type Article
 
Identifier JOURNAL OF APPLIED PHYSICS, 116(12)
0021-8979
1089-7550
http://dx.doi.org/10.1063/1.4896365
http://dspace.library.iitb.ac.in/jspui/handle/100/16307
 
Language English