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Modeling the voltage nonlinearity of high-k MIM capacitors

DSpace at IIT Bombay

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Title Modeling the voltage nonlinearity of high-k MIM capacitors
 
Creator KANNADASSAN, D
KARTHIK, R
BAGHINI, MS
MALLICK, PS
 
Subject Voltage nonlinearity
High-k dielectrics
MIM capacitor
Ionic polarization
Induced dipoles
ANODIC OXIDE-FILMS
DENSITY
DIELECTRICS
AL2O3
 
Description Voltage nonlinearity is a crucial performance parameter of MIM capacitors for RF, analog and mixed signal IC applications. In present work, the fabrication and characterization of anodic high-k MIM capacitors are reported in detail and modeling of nonlinearity coefficient of capacitance is developed using polarization of induced dipoles. The model agrees with experimental results for various high-k dielectric MIM capacitors. It explores the origin of nonlinearity in capacitance-voltage characteristics of MIM capacitors and also predicts the potential requirements to meet the ITRS requirements. (C) 2013 Elsevier Ltd. All rights reserved.
 
Publisher PERGAMON-ELSEVIER SCIENCE LTD
 
Date 2014-12-28T17:55:59Z
2014-12-28T17:55:59Z
2014
 
Type Article
 
Identifier SOLID-STATE ELECTRONICS, 91112-117
0038-1101
1879-2405
http://dx.doi.org/10.1016/j.sse.2013.10.012
http://dspace.library.iitb.ac.in/jspui/handle/100/17044
 
Language English