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Electrical and optical properties of transparent conducting InxGa1-xN alloy films deposited by reactive co-sputtering of GaAs and indium

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Title Electrical and optical properties of transparent conducting InxGa1-xN alloy films deposited by reactive co-sputtering of GaAs and indium
 
Creator YADAV, BS
MOHANTA, P
SRINIVASA, RS
MAJOR, SS
 
Subject Indium gallium nitride
Sputtering
Thin film
Electrical properties
Optical properties
BAND-GAP
IN1-XGAXN ALLOYS
ABSORPTION-EDGE
INN
NITRIDE
INGAN
GROWTH
EPITAXY
DIODES
ENERGY
 
Description Thin films of InxGa1-xN alloys were deposited by reactive sputtering using a GaAs target, covered partially with indium and co-sputtered with nitrogen. X-ray and electron diffraction studies indicate the formation of single phase InxGa1-xN films at similar to 500 degrees C. Hall effect and resistivity measurements show that the alloy films with x >= 0.5 have high carrier concentrations in the range of 10(20)-10(21) cm(-3) and mobility of similar to 10 cm(2) V-1 s(-1). Optical measurements of the alloy films show a strong dependence of the band gap on carrier concentration, which is attributed to the Burstein-Moss shift and free carrier effects in the near-infrared region. The values of electron effective mass obtained from plasma resonance data and the Burstein-Moss shift show good agreement. Over a limited composition window of x in the range of 0.5-0.6, the alloy films exhibit low electrical resistivity (approximate to 10(-3) Omega-cm) and high transparency in part of the visible and near infrared regions, followed by high reflectance in the infrared region, which show their potential for applications as transparent electrodes in photovoltaic and photonic devices and as heat mirrors. (C) 2013 Elsevier B.V. All rights reserved.
 
Publisher ELSEVIER SCIENCE SA
 
Date 2014-12-29T05:28:06Z
2014-12-29T05:28:06Z
2014
 
Type Article
 
Identifier THIN SOLID FILMS, 555179-184
0040-6090
http://dx.doi.org/10.1016/j.tsf.2013.11.117
http://dspace.library.iitb.ac.in/jspui/handle/100/17193
 
Language English