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Ultra-thin SiNx in superlattice via nitridation of a-Si in-situ hot wire chemical vapor deposition

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Title Ultra-thin SiNx in superlattice via nitridation of a-Si in-situ hot wire chemical vapor deposition
 
Creator RAI, DK
SOLANKI, CS
BALASUBRAMANIAM, KR
 
Subject Photovoltaics
Quantum dots
Superlattices
Amorphous semiconductors
Silicon nitride
Hot-wire chemical vapor deposition
SILICON-NITRIDE
VISIBLE PHOTOLUMINESCENCE
RAMAN-SPECTROSCOPY
SOLAR-CELLS
FILMS
NANOCRYSTALS
GROWTH
 
Description The fabrication of ultra-thin SiNx (
 
Publisher ELSEVIER SCIENCE SA
 
Date 2014-12-29T05:29:07Z
2014-12-29T05:29:07Z
2014
 
Type Article
 
Identifier THIN SOLID FILMS, 565101-104
0040-6090
http://dx.doi.org/10.1016/j.tsf.2014.07.003
http://dspace.library.iitb.ac.in/jspui/handle/100/17195
 
Language English