Record Details

Atomic Layer Deposited Molybdenum Nitride Thin Film: A Promising Anode Material for Li Ion Batteries

DSpace at IIT Bombay

View Archive Info
 
 
Field Value
 
Title Atomic Layer Deposited Molybdenum Nitride Thin Film: A Promising Anode Material for Li Ion Batteries
 
Creator NANDI, DK
SEN, UK
CHOUDHURY, D
MITRA, S
SARKAR, SK
 
Subject atomic layer deposition
Li ion battery
FTIR
molybdenum nitride
quartz crystal microbalance
TRANSITION-METAL NITRIDE
ELECTRODE MATERIAL
VANADIUM NITRIDE
LITHIUM STORAGE
HYBRID MATERIAL
PERFORMANCE
CU
HYDRODESULFURIZATION
PRECURSOR
GROWTH
 
Description Molybdenum nitride (MoNx) thin films are deposited by atomic layer deposition (ALD) using molybdenum hexacarbonyl [Mo(CO)(6)] and ammonia [NH3] at varied temperatures. A relatively narrow ALD temperature window is observed. In situ quartz crystal microbalance (QCM) measurements reveal the self-limiting growth nature of the deposition that is further verified with ex situ spectroscopic ellipsometry and X-ray reflectivity (XRR) measurements. A saturated growth rate of 2 angstrom/cycle at 170 degrees C is obtained. The deposition chemistry is studied by the in situ Fourier transform infrared spectroscopy (FTIR) that investigates the surface bound reactions during each half cycle. As deposited films are amorphous as observed from X-ray diffraction (XRD) and transmission electron microscopy electron diffraction (TEM ED) studies, which get converted to hexagonal-MoN upon annealing at 400 degrees C under NH3 atmosphere. As grown thin films are found to have notable potential as a carbon and binder free anode material in a Li ion battery. Under half-cell configuration, a stable discharge capacity of 700 mAh g(-1) was achieved after 100 charge discharge cycles, at a current density of 100 mu A cm(-2).
 
Publisher AMER CHEMICAL SOC
 
Date 2014-12-29T05:31:09Z
2014-12-29T05:31:09Z
2014
 
Type Article
 
Identifier ACS APPLIED MATERIALS & INTERFACES, 6(9)6606-6615
1944-8244
http://dx.doi.org/10.1021/am500285d
http://dspace.library.iitb.ac.in/jspui/handle/100/17199
 
Language English