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Enhancement of static and dynamic travel range of electrostatically actuated microbeams using hybrid simulated annealing

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Title Enhancement of static and dynamic travel range of electrostatically actuated microbeams using hybrid simulated annealing
 
Creator TRIVEDI, RR
BHUSHAN, A
JOGLEKAR, MM
PAWASKAR, DN
SHIMPI, RP
 
Subject PULL-IN INSTABILITY
MICROELECTROMECHANICAL SYSTEMS
ELECTROMECHANICAL MODEL
NARROW MICROBEAMS
MEMS SWITCHES
DESIGN
MICROACTUATORS
VOLTAGE
BEAMS
MICROCANTILEVERS
Pull-in instability
MEMS
Hybrid simulated annealing
Electrostatic microbeams
 
Description This study focuses on the enhancement of travel range of electrostatically driven microbeams in static and dynamic mode using hybrid simulated annealing optimization. Continuous, parametric functions are presented for redistribution of width and thickness profiles of the microbeams. The beam model includes nonlinear electrostatic force with fringing field effect, flexure and midplane stretching. For structural analysis, an energy based technique is used for extracting the pull-in displacement and pull-in voltage. The accuracy of this model is established by validating the results with 3-D finite element simulations. Constraints having engineering importance are implemented through penalty approach. The optimization results show substantial improvement in pull-in displacement of microbeams compared to conventional prismatic microbeam. (C) 2015 Elsevier Ltd. All rights reserved.
 
Publisher PERGAMON-ELSEVIER SCIENCE LTD
 
Date 2016-01-14T14:01:03Z
2016-01-14T14:01:03Z
2015
 
Type Article
 
Identifier INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 98,93-110
0020-7403
1879-2162
http://dx.doi.org/10.1016/j.ijmecsci.2015.03.024
http://dspace.library.iitb.ac.in/jspui/handle/100/17675
 
Language en