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Polymer-Based MEMS Photodetector With Spectral Response in UV-Vis-NIR and Mid-IR Region

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Title Polymer-Based MEMS Photodetector With Spectral Response in UV-Vis-NIR and Mid-IR Region
 
Creator ROY, SC
KUNDU, T
RAO, VR
 
Subject ULTRAVIOLET
NM
NANOPARTICLES
CONDUCTIVITY
EMISSION
IR
MEMS
photoconductivity
photodetector
photoresponse
pyroelectricity
wideband
 
Description Integrating various components on the same chip is highly sought after for various optoelectronic applications. In an attempt to provide an on-chip photodetection, a MEMS-based photodetector device with a wide spectral response is presented. The design merges the photoconductive and pyroelectric properties of nanomorphology-controlled polyvinyl alcohol as a photoactive layer. The fabrication technology is low cost with a single-layer deposition of photoactive polymer on a MEMS low thermal mass platform designed to improve the heat loss to the substrate. This fabricated device with a metal-semiconductor-metal structure shows Schottky diode behavior. The photoresponse of this device was observed from UV to mid-IR region with minimum light detection capability of 30 nW in UV, 120 nW for visible light, and 100 mu W for IR light. The effect of nanomorphology and the thickness of the photoactive layer were studied to optimize the responsivity in the different waveband regions. Typically, at zero bias, under 405-nm illumination with light intensity of 170 mu W/cm(2), the photodetector exhibited responsivity of 0.53 A/W. The wavelength response of this detector was found to be similar with standard detectors of the UV visible as well as mid-IR region (6.3-10.6 mu m). The proposed on-chip MEMS-based photodetection module with the broad-spectrum detection capability and lower power consumption is useful for lab-on-chip-based technologies for a wide range of optical/spectroscopic applications.
 
Publisher IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
 
Date 2016-01-15T08:50:57Z
2016-01-15T08:50:57Z
2015
 
Type Article
 
Identifier JOURNAL OF LIGHTWAVE TECHNOLOGY, 33(15)3345-3350
0733-8724
1558-2213
http://dx.doi.org/10.1109/JLT.2015.2430618
http://dspace.library.iitb.ac.in/jspui/handle/100/18206
 
Language en