Record Details

Studies On The Development Of Piezoelectric Thin Flm Based Impact Sensor

Electronic Theses of Indian Institute of Science

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Field Value
 
Title Studies On The Development Of Piezoelectric Thin Flm Based Impact Sensor
 
Creator Gokhale, Nikhil Suresh
 
Subject Thin Film Sensors
Piezoelectricity
Thin Film Deposition
Piezoelectric Zinc Oxide Thin Films
Thin Film Technology
Impact Sensor
Piezoelectric Sensor
Piezoelectric ZnO Thin Films
Instrumentation
 
Description Sensors is one of the major areas of current research. Thin film micro/nano sensors are gaining attention worldwide, as there is necessity of miniaturization. There are varieties of sensors available by utilizing different materials in bulk and thin film form for measuring parameters like temperature, pressure, flow, humidity etc. Apart from these, there are various sensors available to measure impact force.
Impact sensor offers potential application possibilities in robotics, aerospace, structural & mechanical engineering and related areas. Many physical principles have been explored for the realization of impact sensor. The present thesis reports the efforts made in developing impact sensor using piezoelectric thin film. The necessary brief background information on impact sensors is presented in Chapter 1. This includes the description of available literature on impact sensors and their probable applications. In Chapter 2, a review of the various techniques such as thin film deposition techniques, film thickness measurement techniques, thin film characterization techniques, used in our work are explained in detail. Chapter 3 explains the direct and indirect methods of characterization used for confirming the piezoelectric property of zinc oxide thin films. The detailed experimental work carried out in realizing the impact sensor using piezoelectric thin films is presented in chapter 4. This includes design of the sensor, calibration setup used & the procedure followed and results obtained.
Finally, we present the summary of the work carried out in the thesis, conclusions arrived at and the scope for carrying out further work in the direction of making the sensor more efficient.
 
Contributor Rajanna, K
 
Date 2010-07-20T09:07:06Z
2010-07-20T09:07:06Z
2010-07-20
2008-12
 
Type Thesis
 
Identifier http://hdl.handle.net/2005/770
 
Language en_US
 
Relation G22901