Piezoelectric microvalve
NOPR - NISCAIR Online Periodicals Repository
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Title |
Piezoelectric microvalve
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Creator |
Ramanamurthy, P V M
Ahrens, R Karmalkar, S |
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Subject |
Piezoelectric microvalve
Microreactor |
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Description |
278-281
A normally closed microvalve is a very important component of a microfluidic system. The fabrication of an active, normally-closed piezoelectric microvalve useful for automated drug delivery or control of fluids in microreactor systems has been studied. The microvalve has dimensions of 19 mm X 19 mm X 7 mm, an inlet diameter of 200 μm, a dead volume of 0.33 μl and has a steady-state flow-rate of about 240 sccm. |
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Date |
2008-10-31T10:20:49Z
2008-10-31T10:20:49Z 2007-04 |
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Type |
Article
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Identifier |
0019-5596
http://hdl.handle.net/123456789/2322 |
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Language |
en_US
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Relation |
H01L41/00
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Publisher |
CSIR
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Source |
IJPAP Vol.45(4) [April 2007]
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