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Piezoelectric microvalve

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Title Piezoelectric microvalve
 
Creator Ramanamurthy, P V M
Ahrens, R
Karmalkar, S
 
Subject Piezoelectric microvalve
Microreactor
 
Description 278-281
A normally closed microvalve is a very important component of a microfluidic system. The fabrication of an active, normally-closed piezoelectric microvalve useful for automated drug delivery or control of fluids in microreactor systems has been studied. The microvalve has dimensions of 19 mm X 19 mm X 7 mm, an inlet diameter of 200 μm, a dead volume of 0.33 μl and has a steady-state flow-rate of about 240 sccm.
 
Date 2008-10-31T10:20:49Z
2008-10-31T10:20:49Z
2007-04
 
Type Article
 
Identifier 0019-5596
http://hdl.handle.net/123456789/2322
 
Language en_US
 
Relation H01L41/00
 
Publisher CSIR
 
Source IJPAP Vol.45(4) [April 2007]