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Silicon-based MEMS fabrication techniques and standardization

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Field Value
 
Title Silicon-based MEMS fabrication techniques and standardization
 
Creator Hao, Yilong
 
Subject MEMS
Silicon-based MEMS
Micromachining
 
Description 317-320
The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper.
 
Date 2008-10-31T10:26:25Z
2008-10-31T10:26:25Z
2007-04
 
Type Article
 
Identifier 0019-5596
http://hdl.handle.net/123456789/2329
 
Language en_US
 
Relation B81B7 /02
 
Publisher CSIR
 
Source IJPAP Vol.45(4) [April 2007]