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Micromachined conductor backed coplanar waveguides for millimeter wave circuit application

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Title Micromachined conductor backed coplanar waveguides for millimeter wave circuit application
 
Creator Koul, Shiban K
Kumbhat, Abhishek
Basu, Ananjan
 
Subject Micromachined CBCPW line
RF MEMS
Discontinuity Models
Millimeter waves
 
Description 336-344
Conductor Backed Coplanar Waveguide (CBCPW) lines on Si micromachined substrate are in use for more than a decade, but their detailed analysis is still not available in the open literature. This paper presents design data and closed form expressions on characteristic parameters of CBCPW lines on Si-micromachined structures that are valid up to 40 GHz. Effect of various physical parameters are studied. Procedure for deriving lumped equivalent circuit models for discontinuities on Si-Micromachined substrate as a function of discontinuity physical parameters is also presented. Scattering parameters obtained from equivalent circuit models agree well with those obtained from full wave FEM for all the discontinuity structures. To show the usefulness of the data generated on discontinuities, design of a Ka-band band pass filter is described. The results presented are useful in designing micromachined components at microwave and millimeter wave frequencies.
 
Date 2008-10-31T11:02:12Z
2008-10-31T11:02:12Z
2007-04
 
Type Article
 
Identifier 0019-5596
http://hdl.handle.net/123456789/2335
 
Language en_US
 
Relation B81B7/02, H01P
 
Publisher CSIR
 
Source IJPAP Vol.45(4) [April 2007]