Record Details

Studies on RF MEMS shunt switch

NOPR - NISCAIR Online Periodicals Repository

View Archive Info
 
 
Field Value
 
Title Studies on RF MEMS shunt switch
 
Creator Sharma, Preeti
Koul, Shiban K
Chandra, Sudhir
 
Subject MEMS shunt switch
Finite-element method
Coplanar Waveguide
RF MEMS
 
Description 387-394
Radio Frequency Micro-Electro-Mechanical-Systems (RF MEMS) based switches are expected to play a key role in the field of microwave switching. Traits like low-loss performance; zero-power consumption and very low inter-modulation distortion have made these switches well suitable for high-performance microwave and millimeter-wave circuits. The design of RF MEMS switches, however, require sophisticated modeling techniques because of their complicated 3-D geometries with critical aspect ratios and strong in-homogeneities. In this paper, the effect of various geometric dimensional parameters on the electromagnetic and mechanical behaviour of a shunt capacitive MEMS switch using finite element method based Ansoft High Frequency Structure Simulator (HFSS) software tool has been presented. This exercise will provide a better insight into designing a reliable and high-performance MEMS shunt switch.
 
Date 2008-10-31T11:10:29Z
2008-10-31T11:10:29Z
2007-04
 
Type Article
 
Identifier 0019-5596
http://hdl.handle.net/123456789/2341
 
Language en_US
 
Relation B81B7/02
 
Publisher CSIR
 
Source IJPAP Vol.45(4) [April 2007]