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Effect of carbon content on the mechanical properties of ternary boron-nitrogen-carbon compound

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Title Effect of carbon content on the mechanical properties of ternary boron-nitrogen-carbon compound
 
Creator Chowdhury, M Pal
Dalui, S
Chakraborty, B R
Mukherjee, A
Pal, A K
 
Subject BNC films
Hard coatings
Chemical vapour deposition
 
Description 776-782
BNC films have been deposited on Si (100) and fused silica substrates by inductively coupled plasma chemical vapour deposition (ICP-CVD) technique using a mixture of borane-ammonia, nitrogen and methane as precursor gases. Carbon content in the films is varied by changing the concentration of methane in the precursor gases. The films are amorphous in nature. The films, thus, deposited have been characterized by using Fourier Transform Infrared Spectroscopy (FTIR), X-ray diffraction and Secondary Ion Mass Spectroscopy (SIMS). Microstructural information has been obtained from SEM studies. Microhardness has been seen to decrease with the increase in carbon content and the highest microhardness observed in these films has been found to be ~5.3 GPa.
 
Date 2008-12-15T09:05:42Z
2008-12-15T09:05:42Z
2008-11
 
Type Article
 
Identifier 0019-5596
http://hdl.handle.net/123456789/2595
 
Language en_US
 
Publisher CSIR
 
Source IJPAP Vol.46(11)) [November 2008]