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Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications

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Title Enhancement of piezoelectric micromachined ultrasonic transducer using polymer membrane for underwater applications
 
Creator Yaacob, Mohd Ikhwan Hadi
Arshad, Mohd Rizal
Manaf, Asrulnizam Abd.
Rahman, Mohamad Faizal Abd
Samsuri, Siti Sarah
 
Subject Piezoelectric
Receiving response
Resonance frequency
Hydrophone
 
Description 533-539
An effort to enhance receiving response
of piezoelectric micromachined ultrasonic transducers (pMUT) at low frequency
was reported. PMUTs were fabricated with the vibrating membrane formed by a
layer of polydimethylsiloxane (PDMS) polymer. Lead zirconate titanate, Pd
(Zt,Ti)O3 (PZT) was utilized as the piezo-active layer, sputtered
with nickel electrodes. Spin coating and low temperature wafer bonding were
proposed as part of the key fabrication methods. Fabricated transducers were
characterized in the compact acoustic tank setup using 500 kHz and 1.25 MHz
reference projectors. Analyses revealed the maximum receiving response was
-36.6 dB re 1V of 200 kHz burst at 10 λ hydrophone-projector separations and 20
V peak to peak of drive voltage on reference projector. Finally, response
spectrum of the transducer was plotted against two commercialized bulk
hydrophones at equivalent frequency band for validation and comparison.
 
Date 2012-11-30T04:13:28Z
2012-11-30T04:13:28Z
2012-12
 
Type Article
 
Identifier 0975-1033 (Online); 0379-5136 (Print)
http://hdl.handle.net/123456789/15148
 
Language en_US
 
Rights CC Attribution-Noncommercial-No Derivative Works 2.5 India
 
Publisher NISCAIR-CSIR, India
 
Source IJMS Vol.41(6) [December 2012]