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<strong>Effect of gold electrode annealing on gas sensing properties of nano-and microstructures of macroporous silicon</strong>

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Title Statement <strong>Effect of gold electrode annealing on gas sensing properties of nano-and microstructures of macroporous silicon</strong>
 
Added Entry - Uncontrolled Name Azim-Araghi, Mohammad esmaeal
sabet dariani, reza
sadr, somaye
rahimi, mehran
 
Uncontrolled Index Term Porous silicon, Nano- and microstructure, DMF, Macroporous, Conductivity, Response
 
Summary, etc. This paper presents porous silicon (PS) with nano-and microstructures as carbon dioxide sensing layers. The <em>p</em>-type Si substrate is subjected to PS etching. The PS morphology has been characterized by scanning electron microscope. According to the parameters of electrochemical process, PS layers were found to have a different structure. By using dimethylformamide (DMF) in electrolyte, regular, honeycomb-like and macroporous structures were formed. PS side of the substrate is then coated with a thin layer of gold and annealed at 500°C. These devices, which operate at room temperature, are more sensitive to the applied voltages in CO<sub>2</sub> gas. The effect of annealing of gold electrode on current-voltage and response-voltage characteristics of PS has been studied. Our results show that the conductivity and response of PS sensors improve much more when its surface is modified with annealing of gold electrode and also nanostructured PS has greater response than the others.
 
Publication, Distribution, Etc. Indian Journal of Pure & Applied Physics (IJPAP)
2016-06-10 13:39:25
 
Electronic Location and Access binary/octet-stream
http://op.niscair.res.in/index.php/IJPAP/article/view/400
 
Data Source Entry Indian Journal of Pure & Applied Physics (IJPAP); ##issue.vol## 51, ##issue.no## 12 (2013): Indian Journal of Pure & Applied Physics
 
Language Note en
 
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