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<strong>Temperature-dependent optical and mechanical properties of obliquely deposited MgF2 thin films</strong>

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Title Statement <strong>Temperature-dependent optical and mechanical properties of obliquely deposited MgF2 thin films</strong>
 
Added Entry - Uncontrolled Name Tien, Chuen-Lin
Lin, Tsai-Wei
 
Uncontrolled Index Term Thin film; Electron-beam evaporation; Residual stress; Surface roughness
 
Summary, etc. <strong>The temperature-dependent optical and mechanical properties of magnesium fluoride (MgF<sub>2</sub>) thin films with small columnar angles have been presented. Electron-beam evaporation method was used to prepare MgF<sub>2</sub> thin films with two different columnar angles of 6° and 24°. MgF<sub>2</sub> thin films were deposited on B270 glass substrates and silicon wafers, respectively. The temperature-dependent optical and mechanical behaviour of MgF<sub>2 </sub>thin<sub> </sub>films with different columnar angles were obtained by elevated temperature in the range 30-110°C. The wavelength shift with temperature was measured by a spectrophotometer for evaluating the stability of obliquely deposited MgF<sub>2</sub> films. The microstructure and surface roughness of the MgF<sub>2</sub> thin films have been measured by scanning electron microscope (SEM) and atomic force microscopy (AFM). Characteristics for the temperature-dependent optical properties and biaxial residual stresses of MgF<sub>2</sub> thin films deposited at two different oblique angles have been measured and compared. The residual stress of MgF<sub>2</sub> thin films deposited on the B270 substrates has been plotted against the measurement temperature, both of the samples showed a linear dependence.</strong>
 
Publication, Distribution, Etc. Indian Journal of Pure & Applied Physics (IJPAP)
2015-05-28 10:58:52
 
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http://op.niscair.res.in/index.php/IJPAP/article/view/843
 
Data Source Entry Indian Journal of Pure & Applied Physics (IJPAP); ##issue.vol## 52, ##issue.no## 2 (2014): Indian Journal of Pure & Applied Physics
 
Language Note en
 
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