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Sputter Deposited ZrC and NbC Thin Films – Studies on Microstructure, Texture and Hardness

Electronic Theses of Indian Institute of Science

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Title Sputter Deposited ZrC and NbC Thin Films – Studies on Microstructure, Texture and Hardness
 
Creator Sathis Kumar, S
 
Subject Transition Metal Carbide Films
Zirconium Carbide
Niobium Carbide
Transition Metal Carbide Coatings
Magnetron Sputtering
ZrC
NbC
ZrC/NbC Superlattice
NiCr Thin Films
Instrumentation
 
Description Transition metal carbides have great industrial importance with a wide area of applications. Unlike many ceramic materials which can be produced from raw materials found in nature, the refractory carbides generally do not exist in the natural state. Synthesis of these carbides is costly and exacting. Sputtered coatings of the refractory metal carbides are of great interest for applications where hard wear-resistant materials are desired. Understanding how the experimental conditions affect the microstructure and properties in reactive sputtering deposition process is still an area of intense research activity.
Reactively sputtered zirconium carbide thin films were grown on (100) silicon substrate and the influence of substrate temperature on the properties of the films were investigated. The substrate temperature was varied from ambient to 500°C and partial pressures of the sputter gas and reactive gas (argon and methane) were optimised to obtain crystalline films. Structural characteristics showed that the films exhibit nanocomposite structure consisting of ZrC nanocrystallites embedded in amorphous carbon typically at lower growth temperature (TS
 
Contributor Mohan Rao, G
Suwas, Satyam
 
Date 2018-08-29T06:23:51Z
2018-08-29T06:23:51Z
2018-08-29
2017
 
Type Thesis
 
Identifier http://etd.iisc.ernet.in/2005/3991
http://etd.iisc.ernet.in/abstracts/4879/G28544-Abs.pdf
 
Language en_US
 
Relation G28544