Development And Synthesis Of Metalorganic Complexes Of Zr, Hf, And Cr For Application To The CVD And Sol-Gel Synthesis Of Oxide Thin Films
Electronic Theses of Indian Institute of Science
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Title |
Development And Synthesis Of Metalorganic Complexes Of Zr, Hf, And Cr For Application To The CVD And Sol-Gel Synthesis Of Oxide Thin Films
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Creator |
Dharmaprakash, M S
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Subject |
Thin Film Devices
Chemical Vapour Deposition (CVD) Organometallic Complexes Metalorganic Complexes Zirconia Thin Films HfO2 Thin Films MOCVD ZrO2 Thin Films VO2 Thin Films Electronic Engineering |
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Contributor |
Shivashankar, S A
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Date |
2011-07-05T09:03:15Z
2011-07-05T09:03:15Z 2011-07-05 2004-07 |
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Type |
Thesis
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Identifier |
http://etd.iisc.ernet.in/handle/2005/1261
http://etd.ncsi.iisc.ernet.in/abstracts/1642/G18604-Abs.pdf |
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Language |
en_US
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Relation |
G18604
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